Mass Flow Ranges：0.5 SCCM–1200 SLPM

Accuracy:Standard:：±0.8% of reading ±0.2% of full scale

High Accuracy Option：±0.4% of reading ±0.2% of full scale 

                                                  Available for ranges ≥5 SCCM models

Measurement Range：1–100% of full scale

Response Time：0.5 SCCM–5 SCCM: As fast as 100 -4000ms

                                    10 SCCM–20 SLPM: As fast as 30-4000 ms

                                     50 SCCM–1200 SLPM: As fast as 30-150 ms

Multi-gas Calibration：98+ pre-loaded gases
Repeatability：Greater of ±0.2%  of full scale
Communications：Analog, RS–232, RS–485, DeviceNet, EtherCAT, EtherNet/IP, TCP/IP, Modbus RTU, PROFIBUS, PROFINET, IO-Link
Operating pressure：11.5 – 160 PSIA

Pressure sensitivity：Mass flow zero shift and span shift: ± (0.08% of reading + 0.02% of full scale) per atm from                                                  tare pressure

Temperature sensitivity：Mass flow zero shift and span shift: ± 0.02% of full scale per °C from 25°C