Mass Flow Ranges：0.5 SCCM–1000 SLPM

Accuracy:Standard:：±0.75% of reading ±0.2% of full scale

High Accuracy Option：±0.4% of reading ±0.2% of full scale 

                                                  Available for ranges ≥5 SCCM models

Measurement Range：0.5–100% of full scale

Response Time：150ms to 63% of step change(T63);user-adjustable

Multi-gas Calibration：98+ pre-loaded gases
Repeatability：Greater of ±0.2% of reading or ±0.02% of full scale
Communications：Analog, RS–232, RS–485, DeviceNet, EtherCAT, EtherNet/IP, TCP/IP, Modbus RTU, PROFIBUS, PROFINET, IO-Link
Operating pressure：11.5– 60 PSIA

Pressure sensitivity：Mass flow zero shift and span shift: ± 0.08% of reading + 0.02% of full scale per atmosphere                                               from tare pressure

Temperature sensitivity：Mass flow zero shift and span shift: 0.03% of full scale per °C from 25°C