Mass Flow Ranges：0.5 SCCM–20 SLPM

Accuracy:Standard:：±0.8% of reading ±0.2% of full scale

High Accuracy Option：±0.4% of reading ±0.2% of full scale 

                                                  Available for ranges ≥5 SCCM models

Measurement Range：1–100% of full scale

Response Time：0.5 SCCM–5 SCCM: As fast as 100 ms, flow rate dependent, user adjustable

                                    10 SCCM–20 SLPM: As fast as 30 ms, flow rate dependent, user adjustable

Multi-gas Calibration：98+ pre-loaded gases
Repeatability：Greater of ±0.1% of reading or ±0.02% of full scale
Communications：Analog, RS–232, RS–485, DeviceNet, EtherCAT, EtherNet/IP, TCP/IP, Modbus RTU, PROFIBUS, PROFINET, IO-Link
Operating pressure：11.5 – 160 PSIA

Pressure sensitivity：Mass flow zero shift: ± 0.02% of full scale per atm from tare pressure  

                                             Mass flow span shift: (± 0.08% of reading ± 0.02% of full scale)per atm from calibration  conditions                 Temperature sensitivity：Mass flow zero shift: ± 0.02% of full scale per °C from tare temperature

                                                     Mass flow span shift: ± 0.02% of reading per °C from 25°C